Precision Analysis of a Class of Large Displacement Parallel Mechanism for Micro/nano Positioning Applications
نویسندگان
چکیده
Since micro/nano positioning devices are increasingly being made of parallel manipulators due to their characteristics, the precision analysis of a class of parallel platform for micro/nano positioning applications is proposed in this paper. The kinematics model of the dual parallel mechanism system is established via the stiffness model of individual wide-range flexure hinge and then the results are compared by the kinematics of rigid body based on vector space method. The errors of the end platform are given to consider the varying performance in the workspace. And the input parameters of prismatic actuators are discussed and the corrected values are proposed on some example points in workspace.
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